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Journal of Wide Bandgap Materials
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Study of Field Emission Characteristics of Diamond Film Fabricated by Two-Step PECVD Method

Ning Deng

Institute of Microelectronics, Tsinghua University Beijing, 100084, P.R. China, ningdeng{at}tsinghua.edu.cn

Changchun Zhu

Department of Microelectronics, Xi’an Jiaotong University, Shaanxi, Xi’an, 710049, P.R. China

A kind of Si-a-C-diamond sandwich structure is proposed for field emission display (FED) application. This composite film structure is realized by two-step PECVD method. The field emission characteristics of this kind of film have been studied. The film shows more stable emission than amorphous carbon film, and large emission site density (8 105 cm 2) as well. It combines merits of the amorphous carbon and diamond successfully and is very suitable as cathode of FED.

Key Words: amorphous carbon • diamond film • PECVD • FED

Journal of Wide Bandgap Materials, Vol. 10, No. 1, 77-83 (2002)
DOI: 10.1177/152451102028018
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